Stack Multilayer Actuator
1. Application range:
(1) All kinds of precision micro table.
(2) Adaptive optics deformable mirror.
(3) Optics micro processing system.
(4) Vehicle control.
(5) Biomedical engineering
(6) Scanning probe microscope
(7) Micropump and Microvalve
3. Main product specification:
| Model No. | Dimension | Nominal displacement | Pushing force @0 displacement | Stiffness | Capacitance |
|
A×B×H [mm] |
[μm@200V] (±10%) | [N@200V] | [N/μm] | [μF](±20%) | |
| HT0303/3 | 3*3*3 | 3 | 330 | 70 | 0.06 |
| HT0303/5 | 3*3*6 | 5 | 330 | 55 | 0.11 |
| HT0303/10 | 3*3*10 | 10 | 330 | 33 | 0.25 |
| HT0505/5 | 5*5*6 | 5 | 900 | 180 | 0.35 |
| HT0505/10 | 5*5*10 | 10 | 900 | 108 | 0.55 |
| HT0505/20 | 5*5*18 | 20 | 900 | 60 | 0.9 |
| HT0505/30 | 5*5*28 | 30 | 900 | 38 | 1.9 |
| HT0505/40 | 5*5*38 | 40 | 900 | 28 | 2.70 |
| HT0707/10 | 7*7*10 | 10 | 1800 | 216 | 1.0 |
| HT0707/20 | 7*7*18 | 20 | 1800 | 120 | 1.9 |
| HT0707/30 | 7*7*28 | 30 | 1800 | 77 | 3.0 |
| HT0707/38 | 7*7*36 | 38 | 1800 | 68 | 3.2 |
| HT0707/50 | 7*7*48 | 50 | 1800 | 51 | 4.5 |
| HT1010/10 | 10*10*10 | 10 | 3600 | 450 | 2.0 |
| HT1010/20 | 10*10*18 | 20 | 3600 | 250 | 3.5 |
| HT1010/30 | 10*10*28 | 30 | 3600 | 160 | 6 |
| HT1010/40 | 10*10*38 | 40 | 3600 | 118 | 9 |
| HT1010/50 | 10*10*48 | 50 | 3600 | 85 | 11 |
| HT1010/60 | 10*10*58 | 60 | 3600 | 60 | 13 |
| HT1414/10 | 14*14*10 | 10 | 7200 | 1000 | 3.5 |
| HT1414/20 | 14*14*20 | 20 | 7200 | 500 | 7 |
| HT1414/30 | 14*14*30 | 30 | 7200 | 333 | 11 |
| HT1414/40 | 14*14*40 | 40 | 7200 | 250 | 14 |
| HT1414/50 | 14*14*50 | 50 | 7200 | 180 | 18 |
| HT1414/60 | 14*14*60 | 60 | 7200 | 120 | 22 |
| HT1616/10 | 16*16*10 | 10 | 9500 | 1400 | 4.6 |
| HT1616/20 | 16*16*20 | 20 | 9500 | 700 | 9 |
| HT1616/30 | 16*16*30 | 30 | 9500 | 480 | 13.5 |
| HT1616/40 | 16*16*40 | 40 | 9500 | 350 | 18 |
3. Type:
(1) According to the shape of pile face:
a. Square: (2×2×2)mm3—(20×20×150) mm3
b. Rectangular: (3×2×2)mm3—(40×20×150) mm3 or
c. Annular: (3×3×φ1×3)mm3 or (φ4×φ1×3)mm3—(30×30×φ16×60)mm3 or (φ40×φ20×60)mm3
(2) According to the packaging:
a. Simple insulation package.
b. Metal shell package.
4. we can design and mnufacture according to customer's requirements.
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