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Help CenterMulti Rotameter Mixing Gas System for CVD System HQ-F
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Specifications
1)Best value Rotameter mixing gas system2) CE, ISO9001 certificate
3) 100% Chinese manufactruer,
Multi rotameter mixing gas system for CVD system
HQ-F mixed gas system is controlled by single or multiple float flow meter, to continuous supply mixed gas, especially convenient switch for many kinds of mixed gas to use. Gas pressure and flow data in the same screen, readable and intuitive, easy to operate; Every gas pipeline are equipped with high pressure cut-off valve, safety and reliability; suitable for measuring the tiny flow of various gases. Compact structure, sensitive adjustment.
For gas flow control of universities, research institutes, industrial and mining enterprises to do high - temperature atmosphere sintering, atmosphere restoring gas, CVD experiments and vacuum annealing.
Note: To ensure safe, strictly prohibited hydrogen and oxygen gas used at the same time.
Model |
HQ-F (Approved by CE certificate, ensure the safety operation of the machine. Certificate No.: GB/1067/4189/12 Issue 1) |
Control mode |
LZB glass rotameter |
Flow |
0.1-1l/min, 25-250ml/min (Customized) |
Accuracy |
±5% |
Gas channel |
Multichannel (Customized) |
Mix gas tank |
Φ100*300mm |
Needle valve |
316 stainless steel |
Pipeline |
Φ 6 mm ptfe pipe |
Pressure gauge |
Φ60mm(0.1~0.15MPa) |
Interface |
SwagelokΦ6mm |
Moving workbench |
720*500*850mm |
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